Composite microstructures for optical data storage
Autor: | Paul Sciortino, Jian J. Wang, Xiaoming Liu, Sebastian Fiorillo, Xuegong Deng, Anguel Nikolov, Lei Chen, Feng Liu, Nada O'brien |
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Rok vydání: | 2007 |
Předmět: | |
Zdroj: | SPIE Proceedings. |
ISSN: | 0277-786X |
DOI: | 10.1117/12.685166 |
Popis: | We design and fabricate polarization-dependent components (PDCs) based on all-dielectric, fully planarized, multilayer microstructures of 150 nm period by using low-loss materials. Quarter-wave and half-wave phase plates at 405 nm are presented. Wafer-level retardation within +/-7deg of the targets and wavefront distortion at 10mm-aperture |
Databáze: | OpenAIRE |
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