Composite microstructures for optical data storage

Autor: Paul Sciortino, Jian J. Wang, Xiaoming Liu, Sebastian Fiorillo, Xuegong Deng, Anguel Nikolov, Lei Chen, Feng Liu, Nada O'brien
Rok vydání: 2007
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.685166
Popis: We design and fabricate polarization-dependent components (PDCs) based on all-dielectric, fully planarized, multilayer microstructures of 150 nm period by using low-loss materials. Quarter-wave and half-wave phase plates at 405 nm are presented. Wafer-level retardation within +/-7deg of the targets and wavefront distortion at 10mm-aperture
Databáze: OpenAIRE