Morphological, Compositional and Phase Evolutions in Sulfur-Rich W-S Targets During Magnetron Sputtering

Autor:	Spencer Gellerup, Corey L. Arnold, Euan Cairnes, Christopher Muratore, Nicholas R. Glavin, Nigel D. Shepherd, Andrey A. Voevodin
Rok vydání:	2023
Předmět:	Condensed Matter Physics Instrumentation Surfaces Coatings and Films
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c1b08e5f579838177d23a9ca61367530 https://doi.org/10.2139/ssrn.4359742 Zobrazit plný text záznamu