Novel stacked capacitor technology for 1-Gbit DRAMs with (Ba,Sr)TiO3 thin films
Autor: | Takeharu Kuroiwa, Mikio Yamamuka, Tsuyoshi Horikawa, Noboru Mikami, Akimasa Yuuki, Tatsuo Oomori, Kouichi Ono, Takaaki Kawahara, Tetsuro Makita, Teruo Shibano |
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Zdroj: | Scopus-Elsevier |
Databáze: | OpenAIRE |
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