Perpendicular Orientation Control without Interfacial Treatment of RAFT-Synthesized High-マ� Block Copolymer Thin Films with Sub-10 nm Features Prepared via Thermal Annealing
Autor: | Lei Wang, Naoko Kihara, Yuriko Seino, Yasunari Yoshimura, Yuki Tanaka, Alvin Chandra, Yoshinori Suzuki, Rina Maeda, Hideaki Yokoyama, Christopher K. Ober, Yuusuke Kasahara, Ken Miyagi, Hiroki Takano, Hironobu Sato, Ryuichi Nakatani, Shinya Minegishi, Teruaki Hayakawa, Tsukasa Azuma |
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Rok vydání: | 2017 |
Předmět: |
chemistry.chemical_classification
Materials science Silicon chemistry.chemical_element 02 engineering and technology Polymer Raft 010402 general chemistry 021001 nanoscience & nanotechnology Methacrylate 01 natural sciences Silsesquioxane 0104 chemical sciences chemistry.chemical_compound chemistry Chemical engineering Polymer chemistry Perpendicular Copolymer General Materials Science Thin film 0210 nano-technology |
Zdroj: | ACS Applied Materials & Interfaces. 9:31266-31278 |
ISSN: | 1944-8252 1944-8244 |
Popis: | In this study, a series of perpendicular lamellae-forming poly(polyhedral oligomeric silsesquioxane methacrylate-block-2,2,2-trifluoroethyl methacrylate)s (PMAPOSS-b-PTFEMAs) was developed based on the bottom-up concept of creating a simple yet effective material by tailoring the chemical properties and molecular composition of the material. The use of silicon (Si)-containing hybrid high-マ� block copolymers (BCPs) provides easy access to sub-10 nm feature sizes. However, as the surface free energies (SFEs) of Si-containing polymers are typically vastly lower than organic polymers, this tends to result in the selective segregation of the inorganic block onto the air interface and increased difficulty in controlling the BCP orientation in thin films. Therefore, by balancing the SFEs between the organic and inorganic blocks through the use of poly(2,2,2-trifluoroethyl methacrylate) (PTFEMA) on the organic block, a polymer with an SFE similar to Si-containing polymers, orientation control of the BCP domains in thin films becomes much simpler. Herein, perpendicularly oriented BCP thin films with a マ㌃ff value of 0.45 were fabricated using simple spin-coating and thermal annealing processes under ambient conditions. The thin films displayed a minimum domain size of L0 = 11 nm, as observed via atomic force microscopy (AFM), scanning electron microscopy (SEM), and transmission electron microscopy (TEM). Furthermore, directed self-assembly (DSA) of the BCP on a topographically prepatterned substrate using the grapho-epitaxy method was used to successfully obtain perpendicularly oriented lamellae with a half pitch size of ca. 8 nm. |
Databáze: | OpenAIRE |
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