Method for designing phase-calculation algorithms for two-dimensional grating phase-shifting interferometry
| Autor: | Yucong Zhu, Katsumi Sugisaki, Satoru Odate, Ayako Sugaya, Chiaki Koike, Katsura Otaki, Tetsuya Koike, Kiyoshi Uchikawa |
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| Rok vydání: | 2011 |
| Předmět: |
Diffraction
Shearing (physics) Wavefront business.industry Computer science Materials Science (miscellaneous) Phase (waves) Grating Interference (wave propagation) Industrial and Manufacturing Engineering Ronchi test symbols.namesake Interferometry Optics Fourier transform Phase shifting interferometry symbols Business and International Management business |
| Zdroj: | Applied Optics. 50:2815 |
| ISSN: | 1539-4522 0003-6935 |
| DOI: | 10.1364/ao.50.002815 |
| Popis: | We propose a design method of phase-analysis algorithms based on two-dimensional grating phase shifting for Talbot interferometry, Talbot-Lau imaging, or the Ronchi test. These algorithms are designed to separate the two orthogonal shearing wavefronts and eliminate error effects of unwanted diffraction orders, simultaneously. Taking the effect of multidiffraction into account, moving the two-dimensional grating along a certain pass leads to a series of phase-shifted interfrograms, from which two orthogonal shearing wavefronts are derived, for the tested wavefront to be retrieved. The designing process is demonstrated, and the residual errors are analyzed via simulation works and experimental comparison. |
| Databáze: | OpenAIRE |
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