Transparent and Flexible Capacitors with an Ultrathin Structure by Using Graphene as Bottom Electrodes
| Autor: | Xue Chen, Heng Zhang, Guozhen Zhang, Tao Guo, Chang Liu, Hao Wu, Xi Su, Jiaxian Wan |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
transparent and flexible capacitors graphene ZrO2 films atomic layer deposition General Chemical Engineering 02 engineering and technology Dielectric 010402 general chemistry 01 natural sciences Capacitance Article law.invention lcsh:Chemistry Atomic layer deposition law General Materials Science Polyethylene naphthalate business.industry Graphene 021001 nanoscience & nanotechnology 0104 chemical sciences Capacitor Film capacitor lcsh:QD1-999 Electrode Optoelectronics 0210 nano-technology business |
| Zdroj: | Nanomaterials Nanomaterials; Volume 7; Issue 12; Pages: 418 Nanomaterials, Vol 7, Iss 12, p 418 (2017) |
| ISSN: | 2079-4991 |
| Popis: | Ultrathin, transparent and flexible capacitors using graphene as the bottom electrodes were directly fabricated on polyethylene naphthalate (PEN) substrates. ZrO2 dielectric films were deposited on the treated surface of graphene by atomic layer deposition (ALD). The deposition process did not introduce any detectible defects in the graphene, as indicated by Raman measurements, guaranteeing the electrical performances of the graphene electrodes. The Aluminum-doped zinc oxide (AZO) films were prepared as the top electrodes using the ALD technique. The capacitors presented a high capacitance density (10.3 fF/μm2 at 10 kHz) and a relatively low leakage current (5.3 × 10−6 A/cm2 at 1 V). Bending tests revealed that the capacitors were able to work normally at an outward bending radius of 10 mm without any deterioration of electrical properties. The capacitors exhibited an average optical transmittance of close to 70% at visible wavelengths. Thus, it opens the door to practical applications in transparent integrated circuits. |
| Databáze: | OpenAIRE |
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