Vertical MEMS Resonators for Real-Time Clock Applications
| Autor: | Annarita Morea, Ernesto Lasalandra, Pomarico Anna Angela, Roselli Giuditta, Pasquale Flora |
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| Rok vydání: | 2010 |
| Předmět: |
Microelectromechanical systems
Materials science Article Subject Equivalent series resistance Quartz resonator Real-time clock Resonator Control and Systems Engineering Power consumption lcsh:Technology (General) Electronic engineering lcsh:T1-995 Electrical and Electronic Engineering Instrumentation |
| Zdroj: | Journal of Sensors, Vol 2010 (2010) |
| ISSN: | 1687-7268 1687-725X |
| Popis: | MEMS resonators are today widely investigated as a desirable alternative to quartz resonators in real-time clock applications, because of their low-cost, integration capability properties. Nevertheless, MEMS resonators performances are still not competitive, especially in terms of frequency stability and device equivalent resistance (and, then, power consumption). We propose a new structure for a MEMS resonator, with a vertical-like transduction mechanism, which exhibits promising features. The vertical resonator can be fabricated with the low-cost, high performance THELMA technology, and it is designed to be efficiently frequency tunable. With respect to the commonly investigated lateral resonators, it is expected to have lower equivalent resistances and improved large-scale repeatability characteristics. |
| Databáze: | OpenAIRE |
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