Analysis of the Nonlinear Response of Piezo-Micromirrors with the Harmonic Balance Method

Autor: Attilio Frangi, Nicolo Boni, Roberto Carminati, Andrea Opreni
Jazyk: angličtina
Rok vydání: 2021
Předmět:
Work (thermodynamics)
Control and Optimization
Materials science
Astrophysics::High Energy Astrophysical Phenomena
PZT
02 engineering and technology
modelling
Harmonic balance
Condensed Matter::Materials Science
nonlinear dynamics
lcsh:TK1001-1841
lcsh:TA401-492
0202 electrical engineering
electronic engineering
information engineering
micromirros
Microelectromechanical systems
020208 electrical & electronic engineering
Mechanics
harmonic balance
021001 nanoscience & nanotechnology
Piezoelectricity
Finite element method
Computer Science::Other
lcsh:Production of electric energy or power. Powerplants. Central stations
Nonlinear system
Hysteresis
MEMS
Control and Systems Engineering
lcsh:Materials of engineering and construction. Mechanics of materials
0210 nano-technology
Hardening (computing)
Zdroj: Actuators
Volume 10
Issue 2
Actuators, Vol 10, Iss 21, p 21 (2021)
ISSN: 2076-0825
DOI: 10.3390/act10020021
Popis: In this work, we address the simulation and testing of MEMS micromirrors with hardening and softening behaviour excited with patches of piezoelectric materials. The forces exerted by the piezoelectric patches are modelled by means of the theory of ferroelectrics developed by Landau&ndash
Devonshire and are based on the experimentally measured polarisation hysteresis loops. The large rotations experienced by the mirrors also induce geometrical nonlinearities in the formulation up to cubic order. The solution of the proposed model is performed by discretising the device geometry using the Finite Element Method, and the resulting large system of coupled differential equations is solved by means of the Harmonic Balance Method. Numerical results were validated with experimental data collected on the devices.
Databáze: OpenAIRE
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