Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing
| Autor: | Onur Ferhanoglu, M. Fatih Toy, Hamdi Torun, Hakan Urey |
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| Rok vydání: | 2009 |
| Předmět: |
Fabrication
Materials science CCD camera Physics::Instrumentation and Detectors Infrared Physics::Optics Diffraction grating Noise-equivalent temperature Noise (electronics) law.invention Optics law Electrical and Electronic Engineering Instrumentation Optical readout business.industry Netd Detector Thermal detector Astrophysics::Instrumentation and Methods for Astrophysics Metals and Alloys Condensed Matter Physics Laser Surfaces Coatings and Films Electronic Optical and Magnetic Materials Interferometry Optoelectronics business |
| Zdroj: | Sensors and Actuators A: Physical. 156:88-94 |
| ISSN: | 0924-4247 |
| Popis: | Thermo-mechanical detector arrays in the 160 x 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed 12-bit CCD camera for the readout. (C) 2009 Elsevier B.V. All rights reserved. |
| Databáze: | OpenAIRE |
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