Control of Magnetic Field in Neutral Loop Discharge Plasma for Uniform Distribution of Ion Flux on Substrate
| Autor: | Hirotake Sugawara, Tsuyoshi Osaga, Y. Sakurai |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2011 |
| Předmět: |
Nuclear and High Energy Physics
quadrupole magnetic field Materials science Uniform distribution (continuous) ion flux Separatrix Monte Carlo method separatrix Plasma Condensed Matter Physics uniformity Magnetic field Ion Etching Physics::Plasma Physics Physics::Space Physics Quadrupole Atomic physics neutral loop (NL) discharge (NLD) plasma |
| Zdroj: | IEEE Transactions on Plasma Science. 39(11):2550-2551 |
| ISSN: | 0093-3813 |
| Popis: | The production and transport of ions in a neutral loop discharge plasma under a quadrupole magnetic field were investigated using a Monte Carlo method. The ion production occurred around the separatrices of the quadrupole magnetic field and decreased as the neutral loop shrunk. The ion flux on the substrate had its peak near the foot of a separatrix. It was demonstrated that the time-averaged ion flux on the substrate can be distributed uniformly by controlling the magnetic field so that the foot of the separatrix sweeps over the substrate. |
| Databáze: | OpenAIRE |
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