Single-crystal superconducting nanowires of NbSe$_2$ fabricated by reactive plasma etching
| Autor: | Ying Liu, Neal Staley, Jacob Wisser, Chenyi Shen, Shaun A. Mills, Zhu-An Xu |
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| Jazyk: | angličtina |
| Rok vydání: | 2013 |
| Předmět: |
Superconductivity
Nanostructure Materials science Physics and Astronomy (miscellaneous) Condensed matter physics Condensed Matter - Superconductivity Nanowire FOS: Physical sciences 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Electrical contacts Superconductivity (cond-mat.supr-con) Etching (microfabrication) 0103 physical sciences Reactive plasma 010306 general physics 0210 nano-technology Single crystal Electron-beam lithography |
| Popis: | We present the preparation and measurements of nanowires of single-crystal NbSe$_2$. These nanowires were prepared on ultrathin ($\lesssim10\text{ nm}$) flakes of NbSe$_2$ mechanically exfoliated from a bulk single crystal using a process combining electron beam lithography and reactive plasma etching. The electrical contacts to the nanowires were prepared using Ti/Au. Our technique, which overcomes several limitations of methods developed previously for fabricating superconducting nanowires, also allows for the preparation of complex superconducting nanostructures with a desired geometry. Current-voltage characteristics of individual superconducting single-crystal nanowires with widths down to 30~nm and cross-sectional areas as low as 270 nm$^2$ were measured for the first time. |
| Databáze: | OpenAIRE |
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