Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level
| Autor: | Mohamed Lamjed Bouazizi, Bandar Alzahrani, Youichi Bitou, Vít Lédl, Nabil Anwer, Xiangchao Zhang, Hichem Nouira, Ville Heikkinen, Yassir Arezki, Yohan Kondo, Rong Su, Christof Pruss, Charyar Mehdi-Souzani, Richard Leach, François Leprete, Pavel Posta, Christian Schober |
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| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
0209 industrial biotechnology
Computer science Mechanical engineering 02 engineering and technology lcsh:Chemical technology Ultra-high precision measuring machine 01 natural sciences Biochemistry Article Analytical Chemistry 010309 optics 020901 industrial engineering & automation Chain (algebraic topology) Dimensional metrology 0103 physical sciences Calibration lcsh:TP1-1185 Measured data evaluation Electrical and Electronic Engineering uncertainty Instrumentation robust reference minimum zone (Hybrid Trust Region) fitting dimensional metrology aspheric and freeform optical elements System of measurement Uncertainty Magnetorheological finishing Process (computing) measured data evaluation Atomic and Molecular Physics and Optics Metrology Aspheric and freeform optical elements Robust reference minimum zone (Hybrid Trust Region) fitting ultra-high precision measuring machine Nanometre |
| Zdroj: | Arezki, Y, Su, R, Heikkinen, V, Leprete, F, Posta, P, Bitou, Y, Schober, C, Mehdi-Souzani, C, Alzahrani, B A M, Zhang, X, Kondo, Y, Pruss, C, Ledl, V, Anwer, N, Bouazizi, M L, Leach, R & Nouira, H 2021, ' Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level ', Sensors, vol. 21, no. 4, 1103, pp. 1-19 . https://doi.org/10.3390/s21041103 Sensors Volume 21 Issue 4 Sensors (Basel, Switzerland) Sensors, Vol 21, Iss 1103, p 1103 (2021) |
| Popis: | The design of innovative reference aspheric and freeform optical elements was investigated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the values of form error. Agreement among the results of several partners was observed, which demonstrates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes. |
| Databáze: | OpenAIRE |
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