Study of electron field emission from arrays of multi-walled carbon nanotubes synthesized by hot-wire dc plasma-enhanced chemical vapor deposition
| Autor: | Eric Minoux, Jean Eric Bourée, Dohyung Kim, Didier Pribat, Pierre Legagneux, Laurent Gangloff, Costel Sorin Cojocaru |
|---|---|
| Přispěvatelé: | NanoMaDe, Laboratoire de physique des interfaces et des couches minces [Palaiseau] (LPICM), École polytechnique (X)-Centre National de la Recherche Scientifique (CNRS)-École polytechnique (X)-Centre National de la Recherche Scientifique (CNRS), École polytechnique (X)-Centre National de la Recherche Scientifique (CNRS), Spectroscopy Laboratory for Functionnal π-electronic Systems and Department of Chemistry, Yonsei University, Thales Research and Technology [Palaiseau], THALES |
| Rok vydání: | 2006 |
| Předmět: |
Nanotube
Materials science Analytical chemistry Nanotechnology 02 engineering and technology Carbon nanotube Chemical vapor deposition 01 natural sciences 7. Clean energy law.invention Condensed Matter::Materials Science Plasma-enhanced chemical vapor deposition law 0103 physical sciences Materials Chemistry 010302 applied physics Condensed Matter::Mesoscopic Systems and Quantum Hall Effect 021001 nanoscience & nanotechnology Condensed Matter Physics Electronic Optical and Magnetic Materials Carbon nanotube quantum dot Field electron emission [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] Ceramics and Composites 0210 nano-technology Current density Electron-beam lithography |
| Zdroj: | Journal of Non-Crystalline Solids Journal of Non-Crystalline Solids, Elsevier, 2006, 352, pp.1352-1356. ⟨10.1016/J.JNONCRYSOL.2006.01.065⟩ |
| ISSN: | 0022-3093 |
| DOI: | 10.1016/j.jnoncrysol.2006.01.065 |
| Popis: | International audience; Multi-walled carbon nanotubes have been grown on 7 nm Ni-coated substrates consisting of 300 lm thick highly n-doped (1 0 0) sil- icon covered with a diffusion barrier layer (10 nm thick) of SiO2 or TiN, by combining hot-wire chemical vapor deposition and direct current plasma-enhanced chemical vapor deposition at low temperature (around 620 °C). Acetylene gas was used as carbon source and ammonia and hydrogen were used either for dilution or etching. Growth of dense aligned nanotubes could be observed only if the ammonia content was minimized (rv5%). In order to improve the electron field emission properties of the films, different geometrical factors have been taken into account: average length, length/radius ratio and spacing between nanotubes. The nanotube growth rate was controlled by the substrate temperature and the pressure in the reactor, and the nanotube height by the growth time. The nanotube diam- eter was controlled by the catalyst dot volume, and the nanotube spacing was adjusted during the patterning process of the catalyst dots. Using optical lithography, 1 lm Ni dots were obtained and several multi-walled nanotubes with diameter and length in the range 60- 120 nm and rv2.3 lm were grown on each dot. Thus, based on a two-dimensional square lattice with a lattice translation vector of 4 lm, I-V characteristics yielded an onset electric field of 16 V/lm and a maximum emission current density of 40 mA/cm2, due to the large screening effect. Using electron-beam lithography, 100 nm Ni dots were obtained and individual multi-walled nanotubes were grown on each dot. Based on a square lattice with 10 lm translation vector, I-V characteristics gave an onset field of 8 V/lm and a max- imum emission current density of 0.4 A/cm2. |
| Databáze: | OpenAIRE |
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