Femtosecond laser micromachining for optofluidic and energy applications
Autor: | Roberto Osellame, Giorgio Nava, Roberta Ramponi, Sara Lo Turco, K. C. Vishnubhatla |
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Rok vydání: | 2013 |
Předmět: |
Materials science
Fabrication Silicon ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION Optofluidics chemistry.chemical_element Photodetector Inorganic Chemistry chemistry.chemical_compound Femtosecond micromachining Electrical and Electronic Engineering Physical and Theoretical Chemistry Spectroscopy ComputingMethodologies_COMPUTERGRAPHICS business.industry Femtosecond laser micromachining Black silicon Organic Chemistry Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials chemistry Optoelectronics Photonics business Energy (signal processing) |
Zdroj: | Optical materials (Amst., Print) 36 (2013): 102–105. doi:10.1016/j.optmat.2013.04.038 info:cnr-pdr/source/autori:Lo Turco, Sara; Nava, Giorgio; Osellame, Roberto; Vishnubhatla, Krishna Chaitanya; Ramponi, Roberta/titolo:Femtosecond laser micromachining for optofluidic and energy applications/doi:10.1016%2Fj.optmat.2013.04.038/rivista:Optical materials (Amst., Print)/anno:2013/pagina_da:102/pagina_a:105/intervallo_pagine:102–105/volume:36 |
ISSN: | 0925-3467 |
DOI: | 10.1016/j.optmat.2013.04.038 |
Popis: | Femtosecond laser micromachining is a powerful and versatile tool both for the fabrication of photonic and optofluidic devices and for material surface processing. The basics of the technique will be discussed and some examples of applications will be presented. In particular, an optofluidic device for sensing applications, together with silicon surface texturing for applications in the fields of photovoltaic cells and photodetectors are discussed. (C) 2013 Elsevier B.V. All rights reserved. |
Databáze: | OpenAIRE |
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