Open foundry platform for high-performance electronic-photonic integration
| Autor: | Jason S. Orcutt, Vladimir Stojanovic, Stevan Urosevic, Milos A. Popovic, Matthew Weaver, Benjamin Moss, Jonathan Leu, Eugen Zgraggen, Jeffrey M. Shainline, Rajeev J. Ram, Chen Sun, Hanqing Li, Michael Georgas, Jie Sun |
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| Rok vydání: | 2012 |
| Předmět: |
Amplified spontaneous emission
Transistors Electronic Computer science Integrated circuit Waveguide (optics) law.invention Optics law Wavelength-division multiplexing Hardware_INTEGRATEDCIRCUITS Electronic engineering Electronics Digital electronics business.industry Photonic integrated circuit Transistor Optical Devices Equipment Design Atomic and Molecular Physics and Optics Equipment Failure Analysis Systems Integration Optical modulator Optoelectronics Photonics business Waveguide |
| Zdroj: | Optics express. 20(11) |
| ISSN: | 1094-4087 |
| Popis: | This paper presents photonic devices with 3 dB/cm waveguide loss fabricated in an existing commercial electronic 45 nm SOI-CMOS foundry process. By utilizing existing front-end fabrication processes the photonic devices are monolithically integrated with electronics in the same physical device layer as transistors achieving 4 ps logic stage delay, without degradation in transistor performance. We demonstrate an 8-channel optical microring-resonator filter bank and optical modulators, both controlled by integrated digital circuits. By developing a device design methodology that requires zero process infrastructure changes, a widely available platform for high-performance photonic-electronic integrated circuits is enabled. |
| Databáze: | OpenAIRE |
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