Energy control of neutral oxygen particles passing through an aperture electrode
| Autor: | Takeru Okada, Daiki Nakayama, Takeo Ohno, Seiji Samukawa |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Materials science Aperture Physics::Instrumentation and Detectors General Physics and Astronomy chemistry.chemical_element 02 engineering and technology Plasma 021001 nanoscience & nanotechnology Kinetic energy 01 natural sciences Oxygen lcsh:QC1-999 Acceleration chemistry Physics::Plasma Physics 0103 physical sciences Electrode Physics::Space Physics Physics::Accelerator Physics Vacuum chamber Atomic physics 0210 nano-technology Quadrupole mass analyzer lcsh:Physics |
| Zdroj: | Results in Physics, Vol 8, Iss, Pp 169-171 (2018) |
| ISSN: | 2211-3797 |
| Popis: | The kinetic energy of neutralized oxygen particles passing through an aperture electrode was measured by a quadrupole mass spectrometer. The peak energy position was controlled by changing the plasma source power, acceleration bias power, and gas pressure in the vacuum chamber. Keywords: Beam energy, Neutralized plasma particle, Oxygen plasma |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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