A Nanometric Displacement Measurement System Using Differential Optical Feedback Interferometry
| Autor: | Ajit Jha, Francisco J. Azcona, Reza Atashkhooei, Santiago Royo, Jorge Mendez Astudillo |
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| Přispěvatelé: | Universitat Politècnica de Catalunya. Departament d'Òptica i Optometria, Universitat Politècnica de Catalunya. GREO - Grup de Recerca en Enginyeria Òptica |
| Rok vydání: | 2013 |
| Předmět: |
Interferometria
Capacitive sensing Laser sensors Optical power optical feedback interferometry Signal Optics Electronic speckle pattern interferometry Electrical and Electronic Engineering Physics Distributed feedback laser Noise (signal processing) business.industry System of measurement Enginyeria electrònica::Optoelectrònica [Àrees temàtiques de la UPC] Nanoelectronics nanodisplacement sensing Detectors optical metrology Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Interferometry Enginyeria electrònica::Instrumentació i mesura [Àrees temàtiques de la UPC] Nanoelectrònica business |
| Zdroj: | Recercat. Dipósit de la Recerca de Catalunya instname UPCommons. Portal del coneixement obert de la UPC Universitat Politècnica de Catalunya (UPC) |
| ISSN: | 1941-0174 1041-1135 |
| DOI: | 10.1109/lpt.2013.2281269 |
| Popis: | We propose differential optical feedback interferometry, a technique able to measure nanometer-size amplitude displacements by comparing the optical power of two lasers subject to optical feedback. In this letter, the principles of the technique are explained in detail, and its limits are explored by simulation. Theoretical results are presented showing that the technique can measure nanometer scale displacements with resolution within the angstrom scale. An experimental setup for validation has been built, and a series of experimental tests were performed using a capacitive sensor as a reference. Results show good agreement between theory and experiment with a reasonable reduction in performance due to mechanical coupling and signal noise. The proposed technique, thus, provides measurements of a very high resolution using an extremely simple and robust experimental setup. |
| Databáze: | OpenAIRE |
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