A simple and reliable system forin situdeposition of large-area double-sided, superconducting films
| Autor: | Marco Salluzzo, R. Vaglio, Antonello Andreone, G. Pica, V V Palmieri, I I Kulyk, Maria Iavarone, Pasquale Orgiani |
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| Přispěvatelé: | M., Iavarone, Andreone, Antonello, P., Orgiani, G., Pica, M., Salluzzo, Vaglio, Ruggero, I. I., Kuliyk, V., Palmieri |
| Rok vydání: | 2000 |
| Předmět: |
Superconductivity
Materials science business.industry Metals and Alloys Niobium Oxide chemistry.chemical_element Condensed Matter Physics Epitaxy chemistry.chemical_compound THIN-FILMS WAFERS chemistry Cavity magnetron Materials Chemistry Ceramics and Composites Deposition (phase transition) Optoelectronics Electrical and Electronic Engineering business Type-II superconductor Diode |
| Zdroj: | Superconductor science and technology 13 (2000): 1441–1446. doi:10.1088/0953-2048/13/10/307 info:cnr-pdr/source/autori:M.Iavarone, A.Andreone, P.Orgiani, G.Pica, M.Salluzzo, R.Vaglio, I.I.Kulyk, V.Palmieri/titolo:A simple and reliable system for in situ deposition of large-area double-sided, superconducting films/doi:10.1088%2F0953-2048%2F13%2F10%2F307/rivista:Superconductor science and technology (Print)/anno:2000/pagina_da:1441/pagina_a:1446/intervallo_pagine:1441–1446/volume:13 |
| ISSN: | 1361-6668 0953-2048 |
| Popis: | The design and realization of a simple and reliable convertible diode/magnetron deposition system allowing the in situ production of both high-T-c superconducting oxide films and low-T-c superconducting metallic films is presented. The ability to produce high-quality double-sided in situ films with uniform characteristics over 2 " diameter targets is demonstrated. This apparatus can represent a valid alternative to more sophisticated, less flexible deposition systems and is well suited for application in the large-scale production of superconducting filters for wireless communications. |
| Databáze: | OpenAIRE |
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