Material constants extraction for AlScN thin films using a dual mode baw resonator

Autor:	Paul Murali, Fazel Parsapour, Pascal Nicolay, Vladimir Pashchenko
Rok vydání:	2018
Předmět:	Materials science Extraction (chemistry) Resonance Acoustic wave 01 natural sciences Molecular physics Shear (sheet metal) Resonator Excited state 0103 physical sciences Thin film 010306 general physics 010301 acoustics Stiffness matrix
Zdroj:	2018 IEEE Micro Electro Mechanical Systems (MEMS).
DOI:	10.1109/memsys.2018.8346667
Popis:	Dual mode bulk acoustic wave resonators were fabricated using tilted c-axis oriented grains. In this case, longitudinal and shear modes are excited at the same time. The stiffness matrix for the tilted geometry was derived, and served to determine c(33) and c(44) from the two basic resonance frequencies. In addition, it was possible to estimate the tilting angle from the ratio of the sound velocities.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::bc0daa97d33debdbe3b790ddfccdbbd4 https://doi.org/10.1109/memsys.2018.8346667 Zobrazit plný text záznamu