Failure mode analysis on thermally aged hydrophobic coatings applied to electro wetting

Autor: Gwenaël Bonfante, Didier Léonard, Bruno Berge, Stéphanie Chevalliot, Bérangère Toury, Benjamin Burger, Corinne Gablin, Mathieu Maillard
Přispěvatelé: Laboratoire des Multimatériaux et Interfaces (LMI), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Varioptic SA, Varioptic, Surfaces, Institut des Sciences Analytiques (ISA), Institut de Chimie du CNRS (INC)-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS), Association Nationale Recherche Technologie within the program 'Conventions Industrielles de Formation par la Recherche' No 2014/0506 and by the business unit Varioptic.
Rok vydání: 2018
Předmět:
Zdroj: Thin Solid Films
Thin Solid Films, Elsevier, 2018, 646, pp.53-60. ⟨10.1016/j.tsf.2017.11.034⟩
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2017.11.034
Popis: International audience; he aim of this study is to investigate the degradation of hydrophobic coatings at the origin of reliability failure. Various properties such as adhesion and wetting after thermal ageing have been investigated. The layers studied, parylene C, Cytop and Fluoropel deposited on silicon wafers are widely used in electrowetting, MEMS and Lab-on-chip devices. A detailed failure mode analysis is presented, involving chemical surface modification through secondary ion mass spectroscopy by time of flight, X-ray photoelectron spectroscopy, surface energy and tensile strength measurements. We've been able to identify and quantify the origin of failure for each type of coating and the method we applied can be extrapolated to other hydrophobic coating as a benchmark for reliability improvement.
Databáze: OpenAIRE