Digital mirror devices and liquid crystal displays in maskless lithography for fabrication of polymer-based holographic structures

Autor: Maher Rezem, Maximilian Ihme, Sebastian Schlangen, Dina Gödeke, Bernhard Roth, Kristian Boroz, Christian Kelb, Maik Rahlves
Rok vydání: 2015
Předmět:
diffractive optics
Lithography
Materials science
Polymers
Spatial light modulators
Holography
Sheet molding compounds
Photoresist
law.invention
Nanoimprint lithography
Replication accuracies
Optics
Diffractive optical elements
law
ddc:530
Polymer optics
Electrical and Electronic Engineering
Microstructure
Photoresists
Liquid-crystal display
Holographic structures
business.industry
Density (optical)
Liquid crystals
Mechanical Engineering
Holograms
Illumination technology
Topography measurement
Condensed Matter Physics
Atomic and Molecular Physics
and Optics
Electronic
Optical and Magnetic Materials
Light modulators
Mirrors
Mask-less lithography
Holographic display
Digital mirror devices
Optoelectronics
X-ray lithography
Dewey Decimal Classification::500 | Naturwissenschaften::530 | Physik
Digital devices
Display devices
Holographic displays
Liquid crystal displays
business
maskless lithography
Maskless lithography
Zdroj: Journal of Micro/ Nanolithography, MEMS, and MOEMS 14 (2015), Nr. 4
ISSN: 1932-5150
DOI: 10.1117/1.jmm.14.4.041302
Popis: Polymer-based holographic and diffractive optical elements have gained increasing interest due to their potential to be used in a broad range of applications, such as illumination technology, micro-optics, and holography. We present a production process to fabricate polymer-based diffractive optical elements and holograms. The process is based on maskless lithography, which is used to fabricate optical elements in photoresist. We discuss several lab-level lithography setups based on digital mirror devices and liquid crystal devices with respect to illumination efficiency, resolution, and contrast. The entire optical setup is designed with emphasis on low-cost components, which can be easily implemented in an optical research lab. In a first step, a copy of the microstructures is replicated into optical polymeric materials by means of a soft stamp hot embossing process. The soft stamp is made from polydimethylsiloxan, which is coated onto the microstructure in the photoresist. The hot embossing process is carried out by a self-made and low-cost hot embossing machine. We present confocal topography measurements to quantify the replication accuracy of the process and demonstrate diffractive optical elements and holographic structures, which were fabricated using the process presented. © 2015 Society of Photo-Optical Instrumentation Engineers (SPIE). DFG/CRC/PlanOS German Federation of Industrial Research Associations (AiF)/EFB ZN 500
Databáze: OpenAIRE
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