AES, XPS AND TEM characterization of boron nitride deposited under chemical vapor infiltration (CVI) conditions
| Autor: | Danièle Gonbeau, Roger Naslain, S. Prouhet, R. Fourmeaux, Geneviève Pfister-Guillouzo, C. Guimon, K. Hssein, O. Dugne, Alain Guette, J. Sevely |
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| Přispěvatelé: | Institut des sciences analytiques et de physico-chimie pour l'environnement et les materiaux (IPREM), Université de Pau et des Pays de l'Adour (UPPA)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 1989 |
| Předmět: |
010302 applied physics
Materials science General Engineering Stacking chemistry.chemical_element Mineralogy 02 engineering and technology 021001 nanoscience & nanotechnology Microstructure 01 natural sciences Oxygen chemistry.chemical_compound Chemical engineering X-ray photoelectron spectroscopy chemistry Boron nitride Chemical vapor infiltration [PHYS.HIST]Physics [physics]/Physics archives 0103 physical sciences Fiber 0210 nano-technology Boron |
| Zdroj: | Journal de Physique Colloques Journal de Physique Colloques, 1989, 50 (C5), pp.C5-333-C5-341. ⟨10.1051/jphyscol:1989540⟩ |
| DOI: | 10.1051/jphyscol:1989540⟩ |
| Popis: | BN-films deposited, from BF3-NH3 mixtures under CVI-conditions, either within porous SiC fiber preforms or on plan sintered SiC substrates, have been characterized, at a submicron scale, by XRD, AES, XPS and TEM. The deposits are non-stoichiometric with an excess of boron (N:B at. = 0.6 - 0.8) and contain a significant amount of oxygen. The basic structural unit is an almost perfect hexagonal ring. The stacking of the hexagonal layers is turbostratic (d002 = 3.64 A ; Lc = 28 A). The BN layers are randomly orientated in the bulk of the deposit but tend to be aligned parallel to the interface near the substrate surface. The deposit contains numerous submicroscopic pores. It has a low density (1.6 - 1.9 g.cm-3) and a significant nanoporosity (8 - 22 %). The main features of the microstructure are similar to those of pyrocarbon deposits. |
| Databáze: | OpenAIRE |
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