Ion-beam modifications of mechanical and dimensional properties of silicon carbide

Autor: Jean-Marc Costantini, Lionel Thomé, Maxime Sauzay, Xavier Kerbiriou
Přispěvatelé: Service des Recherches Métallurgiques Appliquées (SRMA), Département des Matériaux pour le Nucléaire (DMN), CEA-Direction des Energies (ex-Direction de l'Energie Nucléaire) (CEA-DES (ex-DEN)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay-CEA-Direction des Energies (ex-Direction de l'Energie Nucléaire) (CEA-DES (ex-DEN)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay, CSNSM PCI, Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse (CSNSM), Centre National de la Recherche Scientifique (CNRS)-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Université Paris-Sud - Paris 11 (UP11), Université Paris-Sud - Paris 11 (UP11)-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS)
Jazyk: angličtina
Rok vydání: 2012
Předmět:
010302 applied physics
Materials science
Acoustics and Ultrasonics
Ion beam
Analytical chemistry
61.80.Jh Ion radiation effects 81.40.Np Fatigue
corrosion fatigue
embrittlement
cracking
fracture
and failure 62.20.M- Structural failure of materials 62.20.Qp Friction
tribology
and hardness 61.82.Fk Semiconductors 6
02 engineering and technology
021001 nanoscience & nanotechnology
Condensed Matter Physics
Rutherford backscattering spectrometry
Channelling
01 natural sciences
Surfaces
Coatings and Films
Electronic
Optical and Magnetic Materials
Ion
Amorphous solid
chemistry.chemical_compound
Crystallography
chemistry
0103 physical sciences
Silicon carbide
[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]
Crystallite
0210 nano-technology
Single crystal
Zdroj: Journal of Physics D: Applied Physics
Journal of Physics D: Applied Physics, IOP Publishing, 2012, 45, pp.465301. ⟨10.1088/0022-3727/45/46/465301⟩
Journal of Physics D: Applied Physics, 2012, 45, pp.465301. ⟨10.1088/0022-3727/45/46/465301⟩
ISSN: 0022-3727
1361-6463
DOI: 10.1088/0022-3727/45/46/465301⟩
Popis: 3C-SiC single crystal epitaxial layers, 6H-SiC single crystal plates and α-SiC Hexoloy sinters were irradiated with 4.0 MeV Xe or 4.0 MeV Au ions at room temperature. Mechanical and dimensional evolutions of silicon carbide are studied by means of nano-indentation and step-height measurements which are correlated with Rutherford backscattering spectrometry and channelling (RBS/C) data in single crystals. Irradiation with Xe ions induces a total lattice disorder related to amorphization for a fluence of 1 × 1015 cm−2 in both polytypes. When complete amorphization is reached, around the same values of Young's modulus (∼350 GPa) and Berkovich hardness (∼27 GPa) are found in both polytypes. The out-of-plane expansion increases with irradiation dose and the saturation value measured in the amorphous layer (normalized to the projected range of the ions) is close to 20–25%. Modifications of macroscopic properties are mainly governed by the disordered fraction of the material in a two-step damage process. A similar behaviour of material evolution is found for the cubic and hexagonal polytypes, either in single crystals or sintered polycrystalline samples. Calculations of Young's modulus and volume swelling are carried out using the analytical (Reuss and Voigt) models of homogenization.
Databáze: OpenAIRE
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