Fully integrated nano-opto-electro-mechanical wavelength and displacement sensor

Autor: T. Xia, Ewold Verhagen, Z. Zobenica, F. W. M. van Otten, Leonardo Midolo, YongJin Cho, Michele Cotrufo, Francesco Pagliano, Andrea Fiore, Maurangelo Petruzzella, Rick Leijssen, R.W. van der Heijden
Přispěvatelé: EMGO - Musculoskeletal health, Public and occupational health, Photonics and Semiconductor Nanophysics, NanoLab@TU/e, Semiconductor Nanophotonics
Jazyk: angličtina
Rok vydání: 2014
Předmět:
Zdroj: Optical Sensors, Sensors 2016
Zobenica, van der Heijden, R W, Petruzzella, M, Pagliano, F, Leijssen, R, Xia, T, Midolo, L, Cotrufo, M, Cho, Y J, van Otten, F W M, Verhagen, E & Fiore, A 2014, Fully integrated nano-opto-electro-mechanical wavelength and displacement sensor . in Optical Sensors, Sensors 2016 . OSA-The Optical Society, Optical Sensors, Sensors 2016, Vancouver, Canada, 18/07/2016 .
Optical Sensors 2016, 18-20 July 2016, Vancouver, Canada: Micro-and Nano-Engineered Sensors I, 1-3
STARTPAGE=1;ENDPAGE=3;TITLE=Optical Sensors 2016, 18-20 July 2016, Vancouver, Canada
Popis: We report a high resolution wavelength and displacement sensor based on an electromechanically tuneable photonic crystal cavity, where sensing, actuation and electrical readout are integrated together in the same device.
Databáze: OpenAIRE