Sapphire-Based Dammann Gratings for UV Beam Splitting
| Autor: | Li-Gang Niu, Yan-Hao Yu, Lei Wang, Yun-Lu Sun, Qian-Kun Li, Hong-Bo Sun, Qi-Dai Chen |
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| Rok vydání: | 2016 |
| Předmět: |
lcsh:Applied optics. Photonics
Materials science laser amplifiers 02 engineering and technology medicine.disease_cause Diffraction efficiency 01 natural sciences ultraviolet (UV) lasers law.invention 010309 optics X-ray laser Optics law 0103 physical sciences medicine lcsh:QC350-467 Electrical and Electronic Engineering Fabrication and characterization Laser ablation business.industry lcsh:TA1501-1820 021001 nanoscience & nanotechnology Laser Atomic and Molecular Physics and Optics micro-optics Femtosecond Sapphire Optoelectronics Laser beam quality 0210 nano-technology business lcsh:Optics. Light Ultraviolet |
| Zdroj: | IEEE Photonics Journal, Vol 8, Iss 6, Pp 1-8 (2016) |
| ISSN: | 1943-0655 |
| DOI: | 10.1109/jphot.2016.2620343 |
| Popis: | We report sapphire-based Dammann gratings (DGs) for ultraviolet (UV) beam (266 nm) splitting, which is fabricated via femtosecond laser direct writing assisted with subsequent wet etching. By applying 400-nm-wavelength laser processing followed by wet etching, smooth surface morphology, together with well-tailored geometry, was obtained. These DGs generated 2 × 2, 3 × 3, 4 × 4, and 5 × 5 spot sources in the fan-out as designed and exhibited diffraction efficiency of 59.26%, 39.53%, 44.68%, and 55.37%, respectively, comparable with theoretical values. Such sapphire-based DGs show great potential in UV beam shaping, UV beam splitting, and laser parallel microprocessing. |
| Databáze: | OpenAIRE |
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