Speed enhancement of dynamic spectroscopic ellipsometry by using direct spectral phase extraction method

Autor:	Saeid Kheiryzadehkhanghah, Vamara Dembele, Daesuk Kim, Gukhyeon Hwang
Rok vydání:	2021
Předmět:	Materials science Optics business.industry Phase (waves) Electrical and Electronic Engineering business Engineering (miscellaneous) Atomic and Molecular Physics and Optics
Zdroj:	Applied Optics. 60:10867
ISSN:	2155-3165 1559-128X
Popis:	A rapid direct spectroscopic ellipsometric parameter extraction algorithm for computational speed enhancement of dynamic spectroscopic ellipsometry is described. The proposed direct spectral phase calculation method can provide a faster spectral phase extraction capability than a Fourier transform-based approach, while maintaining the same level of accuracy as that based on the Fourier transform method. We analyze some additional benefits and limitations of the proposed direct computational method in terms of enlarged Δ ( λ ) measurement spectral range and precision optimization.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ba87025d5f0212dfbf10aeec2f07fc4b https://doi.org/10.1364/ao.441657 Zobrazit plný text záznamu