| Autor: |
Valeria Casuscelli, Paola S. Barbato, Rossana Scaldaferri, Paolo Aprea, Domenico Caputo |
| Přispěvatelé: |
Girolamo Di Francia, Corrado Di Natale, Casuscelli, V., Barbato, P. S., Scaldaferri, R., Aprea, P., Caputo, D. |
| Rok vydání: |
2022 |
| Předmět: |
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| Zdroj: |
Lecture Notes in Electrical Engineering ISBN: 9783031081354 |
| DOI: |
10.1007/978-3-031-08136-1_34 |
| Popis: |
Barium Zirconate Titanate-Barium Calcium Titanate (BZT-BCT) has been proposed as an alternative material to toxic lead zirconate titanate (commonly referred as PZT) for the production of micro-electro-mechanical devices based on piezoelectric thin films. Among the possible fabrication methods, sol-gel is the most adoptable and cost-effective technology. To produce good quality films, the homogeneity of the solution is a key factor. For this purpose, 2-methoxyethanol (a toxic, carcinogen solvent) is widely used, although such approach affects the environmental sustainability of the fabrication process. This work deals with the development of a “green” high stable precursor solution based on non-toxic and non-carcinogenic solvents. Results showed that a highly stable, homogeneous solution has been produced thanks to a thorough reagents dehydration. By depositing such solution on commercial platinum-coated wafers, thin layers with homogeneous morphology and improved electrical stability have been produced. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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