Active-matrix monolithic gas sensor array based on MoS2 thin-film transistors
| Autor: | Heekyeong Park, Yena Kwon, Sooho Choo, Na Liu, Sunkook Kim, Sehwan Kim, Seongho Baek, Jeong Yong Yang, Cheol-Woong Yang, Geonwook Yoo |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Materials science
business.industry Transistor 02 engineering and technology Sputter deposition 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences law.invention Active matrix Nanomaterials Sensor array Mechanics of Materials law Thin-film transistor lcsh:TA401-492 Optoelectronics General Materials Science Grain boundary lcsh:Materials of engineering and construction. Mechanics of materials 0210 nano-technology Absorption (electromagnetic radiation) business |
| Zdroj: | Communications Materials, Vol 1, Iss 1, Pp 1-9 (2020) |
| ISSN: | 2662-4443 |
| DOI: | 10.1038/s43246-020-00086-y |
| Popis: | Highly sensitive and system integrable gas sensors play a significant role in industry and daily life, and MoS2 has emerged as one of the most promising two-dimensional nanomaterials for gas sensor technology. In this study, we demonstrate a scalable and monolithically integrated active-matrix gas sensor array based on large-area bilayer MoS2 films synthesized via two-successive steps: radio-frequency magnetron sputtering and thermal sulfurization. The fabricated thin-film transistors exhibit consistent electrical performance over a few centimeters area and resulting gas sensors detect NO2 with ultra-high sensitivity across a wide detection range, from 1 to 256 ppm. This is due to the abundant grain boundaries of the sputtered MoS2 channel, which perform as active sites for absorption of NO2 gas molecules. The demonstrated active-matrix gas sensor arrays display good switching capabilities and are anticipated to be readily integrated with additional circuitry for different gas sensing and monitoring applications. Sensitive and scalable gas sensors are essential in daily life air-quality monitoring. Here, a monolithically integrated gas sensing circuit based on two-step-grown polycrystalline MoS2 films is fabricated, showing good switching and NO2 gas sensing response in a wide detection range of 1 to 256 ppm. |
| Databáze: | OpenAIRE |
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