A novel Love mode SAW sensor with ZnO layer operating in gas and liquid media

Autor:	Kourosh Kalantar-zadeh, Wojtek Wlodarski, Adrian Trinchi, Yuen Yuen Chen, Benjamin N. Fry
Rok vydání:	2002
Předmět:	Detection limit Love wave Materials science business.industry Surface acoustic wave Optoelectronics Gravimetric analysis Surface acoustic wave sensor Sense (electronics) business Biosensor Quartz
Zdroj:	Scopus-Elsevier
DOI:	10.1109/ultsym.2001.991640
Popis:	Novel layered Surface Acoustic Wave (SAW) sensors, based on a ZnO/90/spl deg/ rotated ST-cut quartz crystal structure, were fabricated. They were employed as gravimetric sensor's for immunosensing applications and as SAW conductometric sensors for gas sensing applications. These sensors are able to sense oxygen gas concentrations as low as 0.2 ppm in nitrogen gas. Their mass detection limit in liquid media is as low as 100 pgr/cm/sup 2/.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b99b8c307622f37106c180047b474fbd https://doi.org/10.1109/ultsym.2001.991640 Zobrazit plný text záznamu