A new linearly extended bifocal microwave plasma device
Autor: | Mathias Kaiser, H. Urban, K.-M. Baumgärtner, E. Räuchle, R. Emmerich, Peter Elsner |
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Přispěvatelé: | Publica |
Rok vydání: | 2001 |
Předmět: |
Parabolic antenna
Materials science Argon Atmospheric pressure business.industry chemistry.chemical_element Surfaces and Interfaces General Chemistry Plasma Condensed Matter Physics Surfaces Coatings and Films Optics chemistry Materials Chemistry Continuous wave Antenna (radio) business Microwave Common emitter |
Zdroj: | Surface and Coatings Technology. :939-942 |
ISSN: | 0257-8972 |
DOI: | 10.1016/s0257-8972(01)01319-6 |
Popis: | A new kind of linearly extended plasma source was developed. The prototype of such a device was built up as a barrel with elliptical cross-section. This bifocal shape has two focus lines. A linearly extended microwave antenna is placed along one focus line and the sector of plasma treatment is placed along the second focus line. The antenna is a linear emitter of radial divergent microwave radiation. In this work, a frequency of 2.45 GHz in pulsed and continuous wave (CW) mode was used. The power up to 6 kW CW and 10 kW pulsed is adjustable, pulse on/off times are variable in a wide field. The microwave is reflected by the metallic walls of the barrel and concentrated in the second focus line apart from the antenna. There a quartz tube is placed, that can be evaporated and filled with a working gas at a pressure between 10 2 and 10 5 Pa. The presented experiments have been done with Argon up to atmospheric pressure at a gas flow up to 6 slm. |
Databáze: | OpenAIRE |
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