Effects of Sheet Resistance on mc-Si Selective Emitter Solar Cells Using Laser Opening and One-Step Diffusion
Autor: | Song-Yeu Tsai, Jyh-Jier Ho, Jia-Jhe Liou, Sheng-Shih Wang, Jia-Show Ho, Hsien-Seng Hung, Chi-Hsiao Yeh, Kang L. Wang |
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Rok vydání: | 2015 |
Předmět: |
Laser ablation
Article Subject Renewable Energy Sustainability and the Environment Open-circuit voltage lcsh:TJ807-830 Doping Energy conversion efficiency lcsh:Renewable energy sources Analytical chemistry General Chemistry Laser Atomic and Molecular Physics and Optics law.invention law General Materials Science Quantum efficiency Sheet resistance Common emitter |
Zdroj: | International Journal of Photoenergy, Vol 2015 (2015) |
ISSN: | 1687-529X 1110-662X |
DOI: | 10.1155/2015/208270 |
Popis: | In order to simplify process procedure and improve conversion efficiency (η), we present new steps of laser opening and one-step POCl3diffusion to fabricate selective emitter (SE) solar cells, in which heavily doped regions (HDR) and lightly doped regions (LDR) were formed simultaneously. For HDR, we divided six cells into two groups for POCl3diffusion with sheet resistance (RS) of 40 Ω/sq (for group A) and 50 Ω/sq (for group B). The dry oxidation duration at a temperature of 850°C was 18, 25, and 35 min for the 3 different cells in each group. This created six SE samples with differentRSpairings for the HDR and LDR. The optimal cell (sample SE2) withRSvalues of 40/81 Ω/Sq in HDR/LDR showed the bestηof 16.20%, open circuit voltage (VOC) of 612.52 mV, and fill factor (FF) of 75.83%. The improvement ratios are 1.57% forηand 14.32% for external quantum efficiency (EQE) as compared with those of the two-step diffusion process of our previous study. Moreover, the one-step laser opening process and omitting the step of removing the damage caused by laser ablation especially reduce chemistry pollution, thus showing ecofriendly process for use in industrial-scale production. |
Databáze: | OpenAIRE |
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