Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer With Gold Perforated Proof-Mass Structure

Autor:	Shibata, Kohei, Uchiyama, Akihiro, Onishi, Akira, Machida, Katsuyuki, CHAKRABORTY, P, CHAKRABORTY, Parthojit, Iida, Shinichi, Konishi, Toshifumi, Sone, Masato, Miyake, Yoshihiro, Ito, Hiroyuki
Rok vydání:	2022
Předmět:	Electrical and Electronic Engineering Instrumentation
Zdroj:	IEEE Sensors Journal. 22:14769-14778
ISSN:	2379-9153 1530-437X
DOI:	10.1109/jsen.2022.3184340
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b7b31bfa671f0d7fe0e57e880cc07fbc https://doi.org/10.1109/jsen.2022.3184340 Zobrazit plný text záznamu