Preparation and microstructural characterization of TiC and Ti0.6W0.4∕TiC0.6 composite thin films obtained by activated reactive evaporation
| Autor: | J.-P. Manaud, J.R. Vargas García, Y. LePetitcorps, J. A. Montes de Oca |
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| Přispěvatelé: | Centro de Investigacion en Ciencia Aplicada y Tecnologia Avanzada, IPN, Institut de Chimie de la Matière Condensée de Bordeaux (ICMCB), Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut Polytechnique de Bordeaux-Université de Bordeaux (UB) |
| Rok vydání: | 2008 |
| Předmět: |
Materials science
Scanning electron microscope Thin films Composite 02 engineering and technology Electron microprobe engineering.material 01 natural sciences Carbide chemistry.chemical_compound Coating 0103 physical sciences Thin film Titanium 010302 applied physics Auger electron spectroscopy Titanium carbide Electron-probe microanalysis [CHIM.MATE]Chemical Sciences/Material chemistry Surfaces and Interfaces 021001 nanoscience & nanotechnology Condensed Matter Physics X-ray diffraction Surfaces Coatings and Films Surface coating Crystallography chemistry Chemical engineering engineering Titanium compounds 0210 nano-technology Scanning electron microscopy |
| Zdroj: | Journal of Vacuum Science and Technology A Journal of Vacuum Science and Technology A, American Vacuum Society, 2008, 26 (3), pp.416-421. ⟨10.1116/1.2899457⟩ |
| ISSN: | 1520-8559 0734-2101 |
| DOI: | 10.1116/1.2899457 |
| Popis: | International audience; Titanium carbide-based coatings were deposited on W substrates at a high coating growth rate by activated reactive evaporation at 500 and 600 °C in a L560 Leybold system using propene as reactive atmosphere. The crystal structure, lattice parameter, preferred orientation, and grain size of the coatings were determined by x-ray diffraction technique using Cu Kalpha. The analysis of the coating morphology was performed by scanning electron microscopy (SEM), and the composition of the films was analyzed by Auger electron spectroscopy and electron-probe microanalysis. Experimental results suggested that temperature was one of the most important parameters in the fabrication of stoichiometric TiC coatings. Thus, TiC coatings were obtained at 600 °C, whereas TiC0.6 nonstoichiometric coatings codeposited with a free Ti phase were obtained at 500 °C, giving rise to the formation of a composite thin film. After annealing at 1000 °C, the stoichiometric films remained stable, but a crack pattern was formed over the entire coating surface. In addition, Ti0.6W0.4/TiC0.6 composite thin coatings were obtained for the films synthesized at 500 °C. The formation of a Ti0.6W0.4 ductile phase in the presence of a TiC0.6 phase was responsible to avoid the coating cracking. |
| Databáze: | OpenAIRE |
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