Influence of multilevel crystallization on the intensity oscillations of diffracted high-energy electrons during growth of aluminum arsenide by molecular beam epitaxy

Autor: V. V. Korablev, S. Yu. Karpov, A. N. Alekseev, M.A. Maiorov
Předmět:
Zdroj: Scopus-Elsevier
Popis: Theoretical and experimental investigations are made of the influence of multilevel crystallization on oscillation of the specular reflection intensity of diffracted high-energy electrons during growth of aluminum arsenide by molecular beam epitaxy. The kinematic approximation is used to construct a model to analyze the profile of the oscillation curve and its dependence on the filling of the excess layers. The theoretical predictions are compared with the experimental data.
Databáze: OpenAIRE