Multivariable control of a metrological Atomic Force Microscope
| Autor: | M Maarten Steinbuch, K. R. Koops, Marinus J.G. van de Molengraft, R. J. E. Merry, M.J.C. Ronde |
|---|---|
| Přispěvatelé: | Control Systems Technology |
| Jazyk: | angličtina |
| Rok vydání: | 2009 |
| Předmět: | |
| Zdroj: | Proceedings of 10th European Control Conference (ECC'09), 23-26 August 2009, Budapest, Hungary, 2265-2270 STARTPAGE=2265;ENDPAGE=2270;TITLE=Proceedings of 10th European Control Conference (ECC'09), 23-26 August 2009, Budapest, Hungary Pure TUe ECC |
| Popis: | Atomic Fore Microscopes (AFM) are widely used for nanoscale applications. Until recent developments theseinstruments were controlled in open loop or by a PID type controller. In the last decade robust control techniques emerged for controlling AFMs, but in almost all cases the multivariable behavior was ignored. In this paper we present a multivariable control strategy, using the standard plant framework, appliedto a metrological AFM for the calibration of transfer standards. Although this device has low coupling, we will show that multivariable control has advantages. By using multivariable control, we achieve less coupling between the reference and the output disturbance to the error, compared to decentralizedcontrol. In the imaging region the maximum absolute errors are reduced by 99.7 %, 86.4 % and 42 % for the scanning x, y and imaging z-direction respectively. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|