Nanocontacts fabricated by focused ion beam: characterisation and application to nanometre-sized materials

Autor:	J.-P Abid, Anna Vilà, A Jouati, Mohamed Abid, Klas Hjort, Joan Ramon Morante, Albert Romano-Rodriguez, Olga Casals, Sima Valizadeh, J.-P Collin, F. Hernandez
Předmět:	Materials science chemistry Contact resistance chemistry.chemical_element Deposition (phase transition) Nanotechnology Nanometre Electron Platinum Focused ion beam Nanomaterials Characterization (materials science)
Zdroj:	ResearcherID Springer Proceedings in Physics ISBN: 9783540319146
Popis:	A dual-beam focused ion beam unit has been used to deposit platinum contacts on nanomaterials using both electron- and ion-assisted deposition. Characterization of deposited platinum has been performed and the feasibility of using these nanocontacts to extract electrical parameters of materials demonstrated. The advantage of combining electron- and ion-assisted deposition is discussed.
Databáze:	OpenAIRE
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