Enhancement on the Surface Hydrophobicity and Oleophobicity of an Organosilicon Film by Conformity Deposition and Surface Fluorination Etching
| Autor: | Jin-How Chang, Tai-Hong Chen, Tsung-Hsin Lee, Zheng-Wen Xu, Day-Shan Liu, Yu-Kai Zhang, Pei-Yu Li |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2018 |
| Předmět: |
Materials science
conformity deposition Nanoparticle 02 engineering and technology 010402 general chemistry 01 natural sciences lcsh:Technology Article Contact angle chemistry.chemical_compound silver seed layer Etching (microfabrication) General Materials Science oleophobicity fluorination etching lcsh:Microscopy Deposition (law) Organosilicon lcsh:QC120-168.85 hydrophobicity Glow discharge lcsh:QH201-278.5 lcsh:T 021001 nanoscience & nanotechnology 0104 chemical sciences chemistry Chemical engineering lcsh:TA1-2040 organosilicon film Tetrafluoride lcsh:Descriptive and experimental mechanics lcsh:Electrical engineering. Electronics. Nuclear engineering 0210 nano-technology lcsh:Engineering (General). Civil engineering (General) Layer (electronics) lcsh:TK1-9971 |
| Zdroj: | Materials Volume 11 Issue 7 Materials, Vol 11, Iss 7, p 1089 (2018) |
| ISSN: | 1996-1944 |
| Popis: | In this work, the surface morphology of a hydrophobic organosilicon film was modified as it was deposited onto a silver seed layer with nanoparticles. The surface hydrophobicity evaluated by the water contact angle was significantly increased from 100° to 128° originating from the surface of the organosilicon film becoming roughened, and was deeply relevant to the Ag seed layer conform deposition. In addition, the organosilicon film became surface oleophobic and the surface hydrophobicity was improved due to the formation of the inactive C-F chemical on the surface after the carbon tetrafluoride glow discharge etching. The surface hydrophobicity and oleophobicity of the organosilicon film could be further optimized with water and oleic contact angles of about 138° and 61° respectively, after an adequate fluorination etching. |
| Databáze: | OpenAIRE |
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