ARCHITECTURE FOR INTEGRATED MEMS RESONATORS QUALITY FACTOR MEASUREMENT
| Autor: | Mathias, H., Parrain, F., Gilles, J. -P., Megherbi, S., Zhang, M., Coste, Ph., Dupret, A. |
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| Přispěvatelé: | Institut d'électronique fondamentale (IEF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2007 |
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| Zdroj: | Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS DTIP 2007 DTIP 2007, Apr 2007, Stresa, lago Maggiore, Italy. pp.6-10 |
| Popis: | In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for sufficiently high quality factor values (Q > 100). Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing) |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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