Mo-La2O3 Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices
| Autor: | Eunmi Park, Abhinav Priyadarshi, Gayatri K. Rane, Marietta Seifert, Siegfried Menzel, Thomas Gemming, Steffen Oswald |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
Materials science
Ultra-high vacuum Analytical chemistry chemistry.chemical_element SAW sensors lcsh:Technology Article chemistry.chemical_compound Lanthanum oxide General Materials Science Thin film lcsh:Microscopy Deposition (law) lcsh:QC120-168.85 lcsh:QH201-278.5 lcsh:T Mo-La2O3 multilayers Sputter deposition interdigital transducer material TheoryofComputation_MATHEMATICALLOGICANDFORMALLANGUAGES chemistry Molybdenum lcsh:TA1-2040 Cavity magnetron lcsh:Descriptive and experimental mechanics lcsh:Electrical engineering. Electronics. Nuclear engineering dispersion strengthening lcsh:Engineering (General). Civil engineering (General) Layer (electronics) high-temperature stability lcsh:TK1-9971 |
| Zdroj: | Materials, Vol 12, Iss 17, p 2651 (2019) Materials Volume 12 Issue 17 |
| ISSN: | 1996-1944 |
| Popis: | Developing advanced thin film materials is the key challenge in high-temperature applications of surface acoustic wave sensor devices. One hundred nanometer thick (Mo-La 2 O 3 ) multilayer systems were fabricated at room temperature on thermally oxidized (100) Si substrates (SiO 2 /Si) to study the effect of lanthanum oxide on the electrical resistivity of molybdenum thin films and their high-temperature stability. The multilayer systems were deposited by the magnetron sputter deposition of extremely thin (&le 1 nm) La interlayers in between adjacent Mo layers. After deposition of each La layer the process was interrupted for 25 to 60 min to oxidize the La using the residual oxygen in the high vacuum of the deposition chamber. The samples were annealed at 800 ∘ C in high vacuum for up to 120 h. In case of a 1 nm thick La interlayer in-between the Mo a continuous layer of La 2 O 3 is formed. For thinner La layers an interlayer between adjacent Mo layers is observed consisting of a (La 2 O 3 -Mo) mixed structure of molybdenum and nm-sized lanthanum oxide particles. Measurements show that the (Mo-La 2 O 3 ) multilayer systems on SiO 2 /Si substrates are stable at least up to 800 ∘ C for 120 h in high vacuum conditions. |
| Databáze: | OpenAIRE |
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