A fabrication process for electrostatic microactuators with integrated gear linkages
| Autor: | Legtenberg, R., Legtenberg, Rob, Berenschot, Johan W., Elwenspoek, Michael Curt, Fluitman, J.H.J. |
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| Rok vydání: | 1997 |
| Předmět: |
Materials science
Fabrication Speed wobble Precision engineering METIS-128711 Mechanical Engineering Mechanical engineering chemistry.chemical_compound Surface micromachining Silicon nitride chemistry EWI-13488 IR-23912 Stiction Miniaturization Electronic engineering Electrical and Electronic Engineering Actuator |
| Zdroj: | Journal of microelectromechanical systems, 6(3), 234-241. IEEE |
| ISSN: | 1057-7157 |
| DOI: | 10.1109/84.623112 |
| Popis: | A surface micromachining process is presented which has been used to fabricate electrostatic microactuators. These microactuators are interconnected with each other and linked to other movable microstructures by integrated gear linkages. The gear linkages consist of rotational and linear gear structures, and the electrostatic microactuators include curved electrode actuators, comb-drive actuators, and axial-gap wobble motors. The micromechanical structures are constructed from polysilicon. Silicon dioxide was used as a sacrificial layer, and silicon nitride was used for electrical insulation. A cyclohexane freeze drying technique was used to prevent problems with stiction. The actuators, loaded with various mechanisms, were successfully driven by electrostatic actuation. The work is a first step toward mechanical power transmission in micromechanical systems. |
| Databáze: | OpenAIRE |
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