Micro-fabrication of ceramics: Additive manufacturing and conventional technologies
| Autor: | Heba H. El-Mongy, T.A. El-Sayed, Khamis Essa, Mohamed Imbaby, Amr ElShaer, Hany Hassanin |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
High wear resistance
0209 industrial biotechnology Materials science media_common.quotation_subject Nanotechnology 02 engineering and technology ceramics lcsh:TP785-869 020901 industrial engineering & automation Low density Quality (business) Ceramic media_common Microelectromechanical systems micro parts Structural material Micro fabrication micro-fabrication 021001 nanoscience & nanotechnology Electronic Optical and Magnetic Materials lcsh:Clay industries. Ceramics. Glass micro-electro-mechanical system (MEMS) visual_art generalengineering Ceramics and Composites visual_art.visual_art_medium 0210 nano-technology additive manufacturing |
| Zdroj: | Journal of Advanced Ceramics, Vol 10, Iss 1, Pp 1-27 (2021) |
| ISSN: | 2227-8508 2226-4108 |
| DOI: | 10.1007/s40145-020-0422-5 |
| Popis: | Ceramic materials are increasingly used in micro-electro-mechanical systems (MEMS) as they offer many advantages such as high-temperature resistance, high wear resistance, low density, and favourable mechanical and chemical properties at elevated temperature. However, with the emerging of additive manufacturing, the use of ceramics for functional and structural MEMS raises new opportunities and challenges. This paper provides an extensive review of the manufacturing processes used for ceramic-based MEMS, including additive and conventional manufacturing technologies. The review covers the micro-fabrication techniques of ceramics with the focus on their operating principles, main features, and processed materials. Challenges that need to be addressed in applying additive technologies in MEMS include ceramic printing on wafers, post-processing at the micro-level, resolution, and quality control. The paper also sheds light on the new possibilities of ceramic additive micro-fabrication and their potential applications, which indicates a promising future. |
| Databáze: | OpenAIRE |
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