Supplementary document for Visible Upconversion Luminescence of Doped Bulk Silicon for a Multimodal Wafer Metrology - 5238912.pdf
| Autor: | Afinogenov, Boris, Sofronov, Anton, Antropov, Ilya, Filatov, Nikita, Medvedev, Anton, Shorokhov, Alexander, Mantsevich, Vladimir, Maslova, Natalia, Kim, Taehyun, jeang, eunhee |
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| Rok vydání: | 2021 |
| DOI: | 10.6084/m9.figshare.14709954 |
| Popis: | Supplemental document |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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