Nanoparticle scanning and detection on flat and structured surfaces using fluorescence microscopy

Autor:	Jin-Goo Park, Prashanth Makaram, Kaveh Bakhtari, Rasim Guldiken, Ahmed Busnaina
Rok vydání:	2007
Předmět:	Histology Materials science business.industry Scanning confocal electron microscopy Nanoparticle Nanotechnology Fluorescence Medical Laboratory Technology Semiconductor Fluorescence microscope Scanning ion-conductance microscopy Particle Anatomy business Instrumentation Nanoscopic scale
Zdroj:	Microscopy Research and Technique. 70:534-538
ISSN:	1097-0029 1059-910X
Popis:	A new technique is proposed for the scanning and detection of nanoparticles on flat substrates and three-dimensional structures using fluorescence microscopy. This technique is utilized for particle removal measurements especially in semiconductor and hard disk manufacturing. This fluorescent particle scanning technique enables nanoscale particle detection. The technique shows that single particles down to 63 nm could be detected and counted. The technique is also capable of detecting particles in trenches that are as deep as 500 μm. Microsc. Res. Tech., 2007. © 2007 Wiley-Liss, Inc.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b619c94e578df96915eb45d5578898cb https://doi.org/10.1002/jemt.20477 Zobrazit plný text záznamu Plný text