Realization of fabrication-tolerant Si3N4-Si mode transformers

Autor:	Stijn Poelman, Stijn Cuyvers, Jasper De Witte, Bart Kuyken, Dries Van Thourhout
Jazyk:	angličtina
Rok vydání:	2021
Předmět:	Materials science Fabrication Technology and Engineering Silicon business.industry coupled mode theory Mode (statistics) chemistry.chemical_element Laser law.invention chemistry law Mode transformer Optoelectronics business Transformer Realization (systems) microtransfer printing
Zdroj:	2021 Annual Conference of the IEEE Photonics Society (IPC) IEEE Photonics Conference (IPC) 2021 IEEE Photonics Conference (IPC)
ISSN:	2575-274X
Popis:	A III-V/Si/Si 3 N 4 structure critical in realizing high-performance lasers can be fabricated using microtransfer printing. This approach poses stringent requirements on the $\text{Si}_{3}\mathrm{N}_{4}-\text{Si}$ couplers. Accordingly, we realized $174\ \mu \mathrm{m}$ long, fabrication-tolerant Si tapers with simulated losses below 0.8 dB up to 750 nm misalignment.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b5b37520532f2e03cac203535a450c3d https://hdl.handle.net/1854/LU-8738920 Zobrazit plný text záznamu