| Autor: |
Lillian Thiel, Alan D. Logan, Srivatsa Chakravarthi, Shivangi Shree, Karine Hestroffer, Fariba Hatami, Kai-Mei C. Fu |
| Rok vydání: |
2022 |
| Předmět: |
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| Zdroj: |
Optics Express. 30:6921 |
| ISSN: |
1094-4087 |
| DOI: |
10.1364/oe.446244 |
| Popis: |
We demonstrate post-fabrication target-wavelength trimming with a gallium phosphide on a silicon nitride integrated photonic platform using controlled electron-beam exposure of hydrogen silsesquioxane cladding. A linear relationship between the electron-beam exposure dose and resonant wavelength red-shift enables deterministic, individual trimming of multiple devices on the same chip to within 30 pm of a single target wavelength. Second harmonic generation from telecom to near infrared at a target wavelength is shown in multiple devices with quality factors on the order of 104. Post-fabrication tuning is an essential tool for targeted wavelength applications including quantum frequency conversion. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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