A Reversible Method to Characterize the Mass Sensitivity of a 3-Dof Mode Localized Coupled Resonator under Atmospheric Pressure
| Autor: | Delphine Cerica, Ali Ghorbani, Michael Kraft, Chen Wang, Maxime Boutier, Vinayak Pachkawade, Chun Zhao, Yuan Wang, Alain Vanderplasschen, Mathieu Baijot |
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| Rok vydání: | 2017 |
| Předmět: |
Microelectromechanical systems
Materials science Atmospheric pressure Analytical chemistry Nanoparticle coupled resonator sensors lcsh:A mode-localized sensors Molecular physics MEMS Resonator Amplitude bio-MEMS Bio-MEMS Sensitivity (control systems) micro-system lcsh:General Works Helical resonator mass sensors |
| Zdroj: | Proceedings, Vol 1, Iss 4, p 493 (2017) |
| Popis: | In this paper, for the first time, the mass sensitivity of a 3-DoF mode localized electrostatic coupled resonator was characterized under atmospheric pressure. A reversible method was used in which nanoparticles are added on and removed from one resonator of the 3-DOF coupled resonator system. Besides, a comparison of three mass sensitivity characterization methods was carried out: resonance frequency shift, amplitude change and resonance vibration amplitude ratio. The results show that a 3-DOF mode localized coupled resonator has potential to be employed for biosensing applications. |
| Databáze: | OpenAIRE |
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