Growth Mechanism of SiC CVD: Surface Etching by H2, H Atoms, and HCl
| Autor: | Pitsiri Sukkaew, Örjan Danielsson, Lars Ojamäe |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Oorganisk kemi Fabrication Chemistry Wide-bandgap semiconductor Analytical chemistry 02 engineering and technology Chemical vapor deposition 021001 nanoscience & nanotechnology Epitaxy 01 natural sciences Inorganic Chemistry chemistry.chemical_compound Transition state theory Etching (microfabrication) 0103 physical sciences Silicon carbide Density functional theory Physical and Theoretical Chemistry 0210 nano-technology |
| Zdroj: | The Journal of Physical Chemistry A. 122:2503-2512 |
| ISSN: | 1520-5215 1089-5639 |
| DOI: | 10.1021/acs.jpca.7b10800 |
| Popis: | Silicon carbide is a wide bandgap semiconductor with unique characteristics suitable for high temperature and high power applications. Fabrication of SiC epitaxial layers is usually performed using chemical vapor deposition (CVD). In this work, we use quantum chemical density functional theory (B3LYP and M06-2X) and transition state theory to study etching reactions occurring on the surface of SiC during CVD in order to combine etching effects to the surface kinetic model for SiC CVD. H-2, H atoms and HCl gases are chosen in the study as the most likely etchants responsible for surface etching. We consider etchings of four surface sites, namely CH3(ads), SiH3CH2(ads), SiH2(CH2)(2)(ads), and SiH(CH2)(3)(ads), which represent four subsequent snapshots of the surface as the growth proceeds. We find that H atoms are the most effective etchant on CH3(ads) and SiH3CH2(ads), which represent the first and second steps of the growth. HCl and H-2 are shown to be much less effective than H atoms and produce the etching rate constants which are, similar to 10(4) and similar to 10(7) times slower. In comparison to CH3(ads), SiH3CH2(ads) is shown to be less stable and more susceptible to etchings. Unlike the first and second steps of the growth, the third and fourth steps (i.e., SiH2(CH2)(2)(ads) and SiH(CH2)(3)(ads)) are stable and much less susceptible to any of the three etchants considered. This implies that the growth species become more stable via forming Si-C bonds with another surface species. The formation of a larger surface cluster thus helps stabilizing the growth against etchings. Funding Agencies|Swedish Foundation for Strategic Research; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (SFO Mat LiU) [2009 00971]; Swedish Research Council (VR) [2016-05137_4] |
| Databáze: | OpenAIRE |
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