Thin-film silicon formation on foreign substrates by rapid thermal chemical vapour deposition for photovoltaic application
Autor: | R. Monna, Abdelilah Slaoui, D. Angermeier, S. Bourdais, J.C. Muller |
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Rok vydání: | 1998 |
Předmět: |
Materials science
Silicon chemistry Chemical engineering Renewable Energy Sustainability and the Environment Thermal Photovoltaic system chemistry.chemical_element Chemical vapor deposition Electrical and Electronic Engineering Thin film Condensed Matter Physics Electronic Optical and Magnetic Materials |
Zdroj: | Scopus-Elsevier |
ISSN: | 1099-159X 1062-7995 |
DOI: | 10.1002/(sici)1099-159x(199807/08)6:4<219::aid-pip206>3.0.co;2-0 |
Databáze: | OpenAIRE |
Externí odkaz: |