High Tc superconductive thin films on semiconductor substrates
| Autor: | H. Murray, B. Mercey, B. Blanc-Guillon, Ph. Lecoeur |
|---|---|
| Rok vydání: | 1994 |
| Předmět: |
Materials science
Silicon business.industry General Physics and Astronomy chemistry.chemical_element Hardware_PERFORMANCEANDRELIABILITY 01 natural sciences Buffer (optical fiber) 010305 fluids & plasmas Semiconductor chemistry [PHYS.HIST]Physics [physics]/Physics archives 0103 physical sciences Hardware_INTEGRATEDCIRCUITS Optoelectronics Microelectronics Deposition (phase transition) Thin film business Layer (electronics) |
| Zdroj: | Journal de Physique IV Proceedings Journal de Physique IV Proceedings, EDP Sciences, 1994, 04 (C6), pp.C6-185-C6-188. ⟨10.1051/jp4:1994629⟩ |
| ISSN: | 1155-4339 1764-7177 |
| DOI: | 10.1051/jp4:1994629 |
| Popis: | The deposition of superconductive thin films on semiconducting substrates is one of the most important goals of technological application in "hybrid" devices. We present in this paper the role of the buffer layer between silicon and the superconductive film. These insulating buffer layers induce MIS properties which can be used in microelectronics. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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