| Autor: |
Takashi Sato, Masatoshi Echigo, Yumi Ochiai, Masako Yamakawa, Makinoshima Takashi, Yu Okada, Masaaki Takasuka |
| Rok vydání: |
2014 |
| Předmět: |
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| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.2045654 |
| Popis: |
In this paper, we report the development of new xanthendiol derivatives applied to the negative-tone molecular resists for EB/EUVL. The new xanthendiol derivatives were easily synthesized by the condensation of aldehydes and dihydroxyaromatic compounds. We found 13-biphenyl-13H-benzoxanthen-3,10-diol was showed the good applicability to the raw material for the resist for EB/EUVL. The EB patterning result showed the resist containing xanthendiol derivative could resolve the 30 nm half-pitch pattern. Furthermore sub 30 nm half-pitch patterns were partially resolved. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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